Micro Flow Meters for Ultra-Low Gas & Liquid Measurement
Measuring very small flow rates can be difficult. Our micro flow meters are engineered
for ultra-low flow conditions, offering stable and precise readings for:
• Gas from 2 sccm
• Liquid from 0.5 ml/min
• Steam from 40 g/h
Built for laboratories, dosing systems, chemical injection, leak testing, and OEM machinery where precision truly matters.
Small Flow Meter Highlights
Ultra-Low Flow Accuracy
Consistent measurement even at extremely low flow rates for gas and liquid systems.Fast Response
Real-time flow tracking ensures stable control for process management.Flexible Installation
Compact design suitable for OEM integration, skid mounting, and lab setups.Multiple Output Signals
4–20mA, pulse, RS485 Modbus available for various control systems.Featured Micro Flow Meter Models
Corrosive Liquid Flowmeter
PP or PVDF construction for aggressive and corrosive liquids. Measures ultra-low flow rates from 13 ml/min, ideal for chemical dosing and acid/alkali processes.
Low flow Gas Mass Flow Meter
High-accuracy gas flow measurement for ultra-low flow ranges. Suitable for analytical instruments, semiconductor processes, leak testing, and laboratory systems.
Micro flow fuel flowmeter
Designed for precise low-rate fuel measurement including gasoline, diesel, ethanol, and biodiesel. Ideal for engine testing, fuel consumption monitoring, and research applications.
Small Coriolis Mass Flow Meter
Suitable for water, silicone, aviation kerosene, diesel, supercritical CO₂, N₂, silane, and more. Cost-effective alternative to Alicat and Bronkhorst.
Typical Measurement Ranges
| Medium | Flow Range | Accuracy |
|---|---|---|
| Gas | 2 sccm – 50 L/min | ±1.5% FS |
| Liquid | 0.5 – 2000 ml/min | ±1% FS |
| Steam | 40 – 250 kg/h | ±2% FS |
Frequently Asked Questions
Can micro flow meters handle pulsating flow?
Most models can handle slight pulsation, but a damping section is recommended for best stability.
What is the minimum flow rate these meters can measure?
Gas: 2 sccm, Liquid: 0.5 ml/min, Steam: 40 g/h.
Which output signals are available?
4–20mA, pulse, RS485 Modbus, and optional 0–5V/0–10V.
Do you offer OEM customized versions?
Yes, customized housing, signal output and calibration ranges are supported.
we will contact you within 24 hours.